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Integrated Explosion and Fire Protection Solutions for Semiconductor Facilities Based on FM Standards and Certifications
Introduction: Key Risks in High-Tech Facilities and the Value of FM Standards
In high-tech manufacturing sectors such as semiconductors, photovoltaics, and panel production, the production environments are complex and inherently hazardous. The extensive use of flammable, explosive, and self-igniting gases (e.g., hydrogen H₂, silane SiH₄) and flammable liquids, coupled with high-energy-density processes like EUV lithography, significantly increases the risks of fires and explosions.
Accidents in such facilities can lead to severe consequences, including casualties, equipment damage, contamination of cleanroom environments, production line disruptions, and catastrophic impacts on business operations.
To mitigate these risks, adherence to FM Global industrial safety standards has become fundamental for building robust safety frameworks in high-tech facilities. Standards such as FMDS 7-7 (“Semiconductor Fabrication Facilities”) serve as core references for structural safety and disaster prevention in high-risk industries.
FM standards emphasize the principle of “intrinsic safety,” focusing on source control—for instance, using low-flammability or non-flammable materials certified under FM 4910 for tools, ducts, and exhaust systems. For areas where risks cannot be fully eliminated (e.g., HPM gas rooms or chemical storage areas), FM standards recommend Damage-Limiting Construction (DLC) strategies. These combine pressure relief and explosion-proof mechanisms to confine damage to specific areas during explosions, ensuring the safety of personnel and critical facilities.
Explosion Venting Solutions: Rapid Pressure Release to Protect Structural Integrity (FMDS 1-44)
Explosion venting is the first line of defense in DLC strategies. It involves quickly releasing pressure through designated pathways during the early stages of deflagration to prevent catastrophic structural damage.
Key elements of FM-compliant explosion venting design include:
- Venting Area (Av): Scientifically calculated based on the reactivity of explosive materials, space volume, and surface area ratio (As/Av).
- Panel Material: Lightweight with low inertia (recommended ≤14.6 kg/m²) to respond instantly to pressure changes.
- Activation Pressure (Pv): Designed for 0.96 kPa (20 psf).
- FM-Certified Components: Includes panels, screws, washers, and tension cables.
Advantages of FM-certified explosion venting systems:
- Adjustable activation pressure values tailored to wind load designs.
- Patented fasteners with anti-tamper bowl-shaped washers and tension cables rated ≥20kN (SUS304).
Explosion-Proof Solutions: Strengthening Structures Against Residual Impacts (FMDS 1-44)
While venting systems release pressure rapidly, explosion-proof structures must withstand residual impacts to ensure the safety of personnel and facilities.
Core requirements include:
- Design Pressure (Pr): Should exceed Pv; recommended ≥50 psf.
- Structural Materials: Reinforced concrete or CNS-certified fire-resistant explosion-proof composite panels.
- Comprehensive Protection: Ceilings and walls in explosion-proof zones must provide equivalent protection to maintain overall stability.
Fire-resistant explosion-proof panel configurations:
- Certified for up to 3 hours of fire resistance under CNS standards.
- Materials meet CNS Class 1 flame resistance standards.
- Structural analysis reports provided to comply with FMDS 1-44 requirements.
Prefabricated Chemical Storage Containers (FMDS 7-29)
FM standards advocate storing flammable liquids and gas cylinders in standalone buildings that meet regulatory specifications to reduce direct risks to main facilities.
Key requirements include:
- Independent structures equipped with secondary containment barriers, explosion-proof electrical systems, automatic fire suppression systems, and fire-resistant construction.
- Gas cylinder storage managed per FMDS 7-50 guidelines, separated from cleanrooms using DLC structures.
Features of prefabricated container solutions:
- Standard 20-ft container structures.
- Equipped with FM-certified rock wool sandwich panels, explosion venting components, and high-strength steel cables.
- Options for integrating 150mm spill containment barriers and pre-installed interfaces for explosion-proof electrical systems and fire suppression systems.
Conclusion: Partnering with Liansuo for Comprehensive FM-Certified Safety Solutions
Liansuo Building Technology leverages deep expertise in FMDS standards (1-44, 7-7, 1-56, 7-29, 7-32) combined with localized engineering experience to deliver integrated solutions:
- FM-certified explosion venting systems
- FM-grade fire-resistant explosion-proof walls/ceilings
- FM-standard prefabricated chemical storage containers
Beyond providing products and designs, Liansuo serves as a long-term strategic partner for risk management in high-tech facilities—enhancing safety resilience while safeguarding personnel and assets.
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